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Metal-polymer and polymer-polymer microcantilevers: promising alternative to Si-based MEMS
| Title: | Metal-polymer and polymer-polymer microcantilevers: promising alternative to Si-based MEMS | Authors: | Đakov, Tatjana   ; Rajaković, Ljubinka V. ; Popović, Ivanka |
Issue Date: | 2015 | Publication: | Journal of Materials Science-Materials in Electronics | ISSN: | 0957-4522 Journal of Materials Science: Materials in Electronics Search Idenfier |
Publisher: | Springer, Dordrecht | Type: | Article | Collation: | vol. 26 br. 11 str. 8698-8706 | DOI: | 10.1007/s10854-015-3545-7 | WoS-ID: | 000362663300056 | Scopus-ID: | 2-s2.0-84943587992 | URI: | http://TechnoRep.tmf.bg.ac.rs/handle/123456789/3134 https://enauka.gov.rs/handle/123456789/549569 |
M-category: | 21M21 |
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