Results
| Title: | Diagnostic Measurements in RF Plasmas for Materials Processing | Authors: | Roberts J. R; Olthoff J. K; Sobolewski M. A; Van-Brunt R. J; Whetstone J. R; Djurović Stevica  |
Issue Date: | 1991 | Publication: | AIP Conference Proceedings 257 Process Module Metrology, Control, and Clustering, Process Module Metrology, Control, and Clustering, Portland, USA, 1991 | Type: | Conference Paper | ISBN: | 0-88318-939-9  Search Idenfier |
Collation: | str. 157-168 | URI: | https://www.cris.uns.ac.rs/record.jsf?recordId=7514&source=eNauka&language=en https://enauka.gov.rs/handle/123456789/585157 |
M-category: | Mp. category will be shown later |
Google ScholarTM
Items in eNauka are protected by copyright, with all rights reserved, unless otherwise indicated.